Products
Laser Micromachining Systems
Lumos Micromachining Workstation for low-volume Micromachining Tasks
The Lumos Laser Micromachining Workstation is engineered to harness the full potential of GHz Burst and Uniform laser modules, providing fast and high-quality micromachining for a range of applications.
Description
Specifications
Drawnings
Description
This advanced setup is ideally suited for both scientific research in laboratories and R&D centers focused on leveraging high-repetition-rate pulses for intricate micromachining tasks.
The workstation is equipped with dual capabilities: high-speed scanning through advanced galvo scanners for rapid processing, and high-precision positioning via micropositioning stages for tasks requiring utmost accuracy. Tailored to meet diverse application needs, the system can be customized with various capacities, ensuring versatility and adaptability for different user requirements.
Specifications
Laser Micromachining System | |
Laser type | Duro fs, Duro GHz, Duro Versa |
Materials to be Processed | Metals, glass, sapphire, polymers, silicon, ceramics |
Sample size | 100 mm x 100 mm x 10 mm |
Smallest feature size | 250 nm |
Scanning systems | 3x translation stage combined with a galvo scanner or high NA objective (4th axis positioning stage optional) |
Scanning system precision and repetability | 0.2 µm and 1 µm |
Sample holder | Flat surface sample holder |
Imaging and metrology | Optional integrated microscope and camera |
Fume extraction system | Available as an option |
Control Options | Optical power, polarization and beam size |
Software | Single GUI, customizable for customer needs |
Stabilization base | Optical bench and granite bases available |
Power Supply | 220 VAC, 15A |
Dimensions, mm (L x W x H) | 1400 x 1200 x 1400 |
Weight | ~300 kg (benchtop version), ~800 kg (granite stabilized version) |
Drawnings
